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Spectroscopic Ellipsometer (SE)
Combined metrology
PresentationGES5E-IRSEGES5E-GXR
Porosimeter Ellipsometer
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Combined metrology

Measuring with two complementary technics the same day at the same location on the sample with reduced Cost Of Ownership. The GES5E can accept Grazing X Ray add-on or FTIR add on on the existing goniometer. The two unique combinations allow full determination of film characteristics and complete material characterization.


GES5E-IRSE Infra Red Spectroscopic Ellipsometer

GES5E-GXR
 
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