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Spectroscopic Ellipsometer (SE)
PresentationGES5E for R&DPurged UV 135nm SESE5E Automatic SEIRSE5E Infra Red EllipsometerGES5E/SE5E Extensions
Combined metrology
Porosimeter Ellipsometer
Optical Heads and In-Situ
Software
EUVR
Excimer Laser SAELC
Spectroscopic Ellipsometer (SE)

SOPRA Products are based on more than 30 years of optical expertise in spectrometers and spectrographs.

SOPRA offers a large family of Table Top and Framed Spectroscopic Ellipsometer to support Research and Development work on Thin Film characterization and Material Science.

The wavelength coverage of SOPRA Spectroscopic Ellipsometers is continuously expanding, from Far UV (135nm) to Far Infra-Red (33µm) with high resolution and/or fast measurement modes.

Spectroscopic Ellipsometers are proposed from manual to fully automated configuration with automatic sample loading from cassettes (SE5).

Moreover, SOPRA offers the possibility to combine several techniques like GXR, FTIR, Porosimetry onto the same R&D Ellipsometer to achieve more accurate diagnostics on complex structures. In this way more applications can be covered, supporting SOPRA’s leading position in the R&D field with more than 600 instruments installed worldwide.


GES5E for R&D

GES5E PUV

SE5E Automatic SE

IRSE5E Infra Red Ellipsometer

Extensions for Spectroscopic Ellipsometer
 
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