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EUVR Extreme UV Reflectometer

Developped in the frame work of RMNT (PREUVE) and MEDEA+ (EXTUMASK), the Goal of this R&D equipment  is to measure the reflectivity versus lntensity and angle of incidence. It is able to admit high dimension of optics and masks (200mm) and to perform a mapping of the entire surface of a 200mm sample


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