The flexibility of the platform allows to implement several options (listed below). Some explanation justifying their use is also given.

Automatic Goniometer:
The standard GES5E is delivered with manual goniometer (5° step from 40 to 90°). Automatic goniometer is recommended when user change frequently its type of substrate. Software allows to automatically place the measurement angle (from 10° to 90°)  to the optimum angle of measurement, allowing also scatterometry.

Fast CCD UV-VIS Spectrograph:
Based on 1024 CCD detector, it covers from 250nm to 1000nm (see optional DUV 190nm). The measurement takes typically one second with FWHM bandwidth of 3nm (0.8nm resolution per pixels). To be used when speed is required like in in-situ application, chemical application, large mapping or pilot production control.

Fast OMA NIR extension:
Extend the fast measurement mode up to 1700nm using a linear InGaAs detector with unequaled FWHM bandwidth of 9nm (3.6nm resolution per pixels) with second level measurement time also. Higher range on request.

High Resolution (HR) UV-VIS Spectrometer:
The R&D mode of choice based on double stage monochromator. The wavelength resolution is set at 0.5nm (lower on demand) for optimised SE (Spectroscopic Ellipsometry) measurement and covers 230nm to 900nm (see optional DUV 190nm). Combined with Photon Multiplier Tube (PMT) and analyser tracking mode it gives the best accuracy and dynamical range. This mode is highly recommended when n&k have to be precisely known and in material development field.

High Resolution Near-Infra Red (NIR) extension up to 2500nm:
Extends the spectral range up to 2500nm using dedicated InGaAsP detector on the spectrometer. Automatic switching allows continuous measurements over the whole spectrum from DUV to NIR. NIR allows thicker layers measurement, brings contactless measurement of thin metal, conductive transparent materials like ITO. It is recommended for large band gap materials (III-V, II-VI…).

Deep UV extensions down to 190nm:
Both High Resolution and Fast measurement mode can benefit from DUV extension down to 190nm in air (135nm in N2 atmosphere see GE5E PUV tool) using 190nm transparent optics.

Automatic Microspots:
Allows the user to focus the beam on a very small area of the sample. Spot down to 50 µm can be achieved for specific applications. Also used when measuring thin transparent substrate. It enables physical extraction from the measurement of the parasitic light coming from backside reflection of the substrate. The backside correction can of course be done thru the software but optical treatment avoids assumption on number of reflections.

Automatic Compensator/Retarder:
Recommended when measuring transparent materials on transparent substrate for example. The Cos Delta been close to +/- 1 this lead to low accuracy (proportional to 1/SinDelta). The retarder place the measure out of this area. It allows to measure the full angular range for Delta and Psi, thus to access depolarisation coefficient. Using appropriate formalism, it also allows to reach 12 coefficients of the Mueller Matrix.

Rotating Compensator(s)/Retarder(s) for Mueller Matrix Determination:
SOPRA SE can be equipped with either one or two Rotating Compensator to determine 12 or all of the 16 coefficients of the Mueller matrix. As standard it covers 300 to 1700nm optics. 190 to 2000nm range is available on request.

Mapping stage (Standard in SE5E):
A mapping stage can be easily adapted on the system, allowing automatic cartography measurements on several types of substrates of variable dimensions. Mapping stage can be supplied fully automatic or for manual operation, X-Y (when anisotropy is present, patterned wafers), Rho-theta, combined stage (X_Y theta for generalized SE).

Visualization CCD Camera:
The ellipsometers can be equipped with various visualization systems. 

Environmental chambers:
Several type of special chambers can be used on the GES5E system depending of the application.
Heating stage
Cryostat
Liquid cell (static/dynamic)
Atmosphere controlled chamber (including EPA chamber please refer to porosimeter products)

GXR, Grazing X rays Option:
See GES5E GXR in combined metrology

IRSE, Infra Red Spectroscopic Ellipsometer Option:
See GES5E IRSE in combined metrology

EPA, Atmospheric Porosimetry Option:
See EPA in Porosimeter Ellipsometer