Following the concept of the GES-GXR, SOPRA has developed another combined system using at the same time two non-destructive characterization techniques: DUV-Visible - NIR Spectroscopic ellipsometry (SE) and Fourier Transform Infra-Red Spectroscopic Ellipsometry (FTIR-SE) which extend the spectral range up to 17 µm (550 cm-1) as standard using highly sensitive MCT detector and to 33µm using Optional DTGS. Using in addition the Near InfraRed option and the Deep UV option, measurements from 190 nm to 33 µm can be performed without discontinuities, without moving or touching the sample and with the same software.

The components are directly adapted to the same goniometer and use the same electronics module, same sample stage computer and software.

Applications: Semi conductor Epilayers (thickness , doping Concentration and profile), Dielectric films characterization (BPSG, SiON, SiOF,…), monitoring of amorphous silicon and silicon Nitride quality ([H] content) , ITO film optical and electrical characterization. Stealth materials characterisation is also actively done using IRSE system.

In addition to the IR ellipsometry, GES IRSE offers the possibility to use the instruments as a standard Fourier Transform spectrometer and perform photometric measurements like transmittance and reflectance, versus angle, polarization.