IMSE, Integrated Metrology Spectroscopic Ellipsometer is designed to be mounted directly on process tools, cluster tools or integrated in platforms on an OEM basis.  
This product line is the direct outcome of SOPRALAB expertise in Semiconductor and Flat Panel Display advanced processes control. Two type of IMSE are available fixed one and ultra compact one to be embarqued on moving metrology head for very large surfaces. Wavelenght range can be set from 190nm to 6µm depending application with spot size down to 50µm.