| Applications by materials |
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Various application notes listed by materials, but we may have more data to show...
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Porous Zirconia
Solid Oxide Fuel Cell by EPA (pdf , 1.26 Mb)
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Doped layers
IRSE-IC dopants (pdf , 272.44 Kb)
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Photo Resist
Photoresist by GES5E PUV (pdf , 284.99 Kb)
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Poly Si
Poly -Si (pdf , 419.65 Kb)
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ITO
OLED by GES5E and environmental (pdf , 2.06 Mb)
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III-V, II-VI and ternary compounds
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AlxGa1-xAs
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Low k
Porous low k materials (pdf , 2.62 Mb)
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TiO2
Dielectric Stack_2 (pdf , 216.22 Kb)
Inhomogeneous Dielectric Film TiO2 (pdf , 233.92 Kb)
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SiN
SiNx and a-Si by IRSE (pdf , 295.29 Kb)
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SiGe
SiGe Thickness and composition by SE (pdf , 293.66 Kb)
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a-Si
SiNx and a-Si by IRSE (pdf , 295.29 Kb)
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HfO2 Al2O3
High K Hf02 Al2O3 using GES5E GXR (pdf , 477.87 Kb)
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BST
BST by DUV (pdf , 247.21 Kb)
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ONO
Characterisation of Ultra thin gate dielectrics by GXR and PUV (pdf , 534.93 Kb)
ONO stack (pdf , 239.2 Kb)
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Ta2O5
Dielectric Stack_1 (pdf , 1.17 Mb)
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BARC TARC
BARC TARC by GES5E DUV (pdf , 365.09 Kb)
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Thick SiO2
Optical Waveguide_2 (pdf , 209.94 Kb)
Optical Waveguide_1 (pdf , 211.42 Kb)
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Polymer
OLED by GES5E and environemental (pdf , 2.06 Mb)
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TiN
TiN ARC (pdf , 235.87 Kb)
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Organics p-dot, CuPC, Alq3, alpha-NPD
Si and Organic based Solar Cells (pdf , 1.95 Mb)
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SiONx
SiON by GES5E DUV (pdf , 326.49 Kb)
SiON ARC by GES5E PUV (pdf , 284.99 Kb)
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