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Spectroscopic Ellipsometer (SE)
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RTSE Real Time In-situ Spectroscopic Ellipsometer

Based on the Optical Arms of the GES5E system and using mechanical adaptation, in-situ measurement can be run. Linked with CCD detection mode, fast data acquisition can be obtained over a range covering 190nm to 2000nm.
See the GES5E brochure for optical Specifications and options

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