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Spectroscopic Ellipsometer (SE)
Combined metrology
Porosimeter Ellipsometer
Optical Heads and In-Situ
Software
PresentationWINSEWINELLI 2
EUVR
Excimer Laser SAELC
WINELLI 2

As a result of 10 years of development, this data processing software dedicated to ellipsometry and photometry is fully compatible with data from SOPRA GES5 series. The software is working under Windows XP, with on line HELP, tutorial and reference (n, k) database.  It allows the simulation of samples or measurements, the regression on measurements and includes databases (materials indices, dispersion laws…) as well as a bibliography ElliBib (over 600 references). Among various Features : 
Simulation of complex samples
2 or 3 materials mixture
Complex or periodic multi-layers structures
Isotropic or anisotropic layers
Alloys modelling for compound semiconductors
Simulation of optical dispersion laws (over 25 mathematical models)
Gradient concentration profiles
Interface roughness modelling 
Ellipsometric and photometric simulation
Simulation as a function of 2 or 3 parameters (2D & 3D graphics)
Sensitivity calculation
Correlation between various parameters 
Regression and extraction of physical parameters
Levenberg-Marquardt regression algorithms
Regression on (tanΨ, cosΔ), (α,β), (εr, εi)
Automatic analysis of multidimensional data files (spectroscopic, angular, mapping)
2D and 3D graphics and high quality printing § Point by point extraction of the parameters (n, k) or (n, thickness)
Regression on (n, k) and derived files. Extraction of the physical parameters from the optical properties of the materials (optical transitions) 
Other characteristics
 The largest (n, k) data base available to date
All models of refractive indices : EMA, polynomial laws, harmonic oscillators, etc. 
Spectral range from 180 nm to 50 µm
Full documentation with examples, on line Help & tutorial provided
Database on Ellipsometry references also including updating and research software
Multisessions capabilities : sessions can be treated in parallel, each session can be saved independently and the collection windows are automatically updated when a parameter is modified in the session

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