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As a result of 10 years of development, this data processing software dedicated to ellipsometry and photometry is fully compatible with data from SOPRALAB GES5 series. The software is working under Windows XP, with on line HELP, tutorial and reference (n, k) database. It allows the simulation of samples or measurements, the regression on measurements and includes databases (materials indices, dispersion laws…) as well as a bibliography ElliBib (over 600 references). Among various Features : Simulation of complex samples 2 or 3 materials mixture Complex or periodic multi-layers structures Isotropic or anisotropic layers Alloys modelling for compound semiconductors Simulation of optical dispersion laws (over 25 mathematical models) Gradient concentration profiles Interface roughness modelling Ellipsometric and photometric simulation Simulation as a function of 2 or 3 parameters (2D & 3D graphics) Sensitivity calculation Correlation between various parameters Regression and extraction of physical parameters Levenberg-Marquardt regression algorithms Regression on (tanΨ, cosΔ), (α,β), (εr, εi) Automatic analysis of multidimensional data files (spectroscopic, angular, mapping) 2D and 3D graphics and high quality printing § Point by point extraction of the parameters (n, k) or (n, thickness) Regression on (n, k) and derived files. Extraction of the physical parameters from the optical properties of the materials (optical transitions) Other characteristics The largest (n, k) data base available to date All models of refractive indices : EMA, polynomial laws, harmonic oscillators, etc. Spectral range from 180 nm to 50 µm Full documentation with examples, on line Help & tutorial provided Database on Ellipsometry references also including updating and research software Multisessions capabilities : sessions can be treated in parallel, each session can be saved independently and the collection windows are automatically updated when a parameter is modified in the session
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